JPH0539561Y2 - - Google Patents

Info

Publication number
JPH0539561Y2
JPH0539561Y2 JP1986105147U JP10514786U JPH0539561Y2 JP H0539561 Y2 JPH0539561 Y2 JP H0539561Y2 JP 1986105147 U JP1986105147 U JP 1986105147U JP 10514786 U JP10514786 U JP 10514786U JP H0539561 Y2 JPH0539561 Y2 JP H0539561Y2
Authority
JP
Japan
Prior art keywords
sample
etching
analysis
chamber
ion gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986105147U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6312153U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986105147U priority Critical patent/JPH0539561Y2/ja
Publication of JPS6312153U publication Critical patent/JPS6312153U/ja
Application granted granted Critical
Publication of JPH0539561Y2 publication Critical patent/JPH0539561Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP1986105147U 1986-07-08 1986-07-08 Expired - Lifetime JPH0539561Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986105147U JPH0539561Y2 (en]) 1986-07-08 1986-07-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986105147U JPH0539561Y2 (en]) 1986-07-08 1986-07-08

Publications (2)

Publication Number Publication Date
JPS6312153U JPS6312153U (en]) 1988-01-26
JPH0539561Y2 true JPH0539561Y2 (en]) 1993-10-07

Family

ID=30979301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986105147U Expired - Lifetime JPH0539561Y2 (en]) 1986-07-08 1986-07-08

Country Status (1)

Country Link
JP (1) JPH0539561Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2764600B2 (ja) * 1989-02-16 1998-06-11 宣夫 御子柴 反射電子線回折装置
JP2987417B2 (ja) * 1993-03-04 1999-12-06 科学技術庁金属材料技術研究所長 透過型電子顕微鏡用の薄膜試料のその場作製および観察方法並びにその装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0314775Y2 (en]) * 1985-02-14 1991-04-02

Also Published As

Publication number Publication date
JPS6312153U (en]) 1988-01-26

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